Co-Design and Characterization of a Differential Wireless Passive Micro-Electromechanical System Pressure Sensor

Co-Design and Characterization of a Differential Wireless Passive Micro-Electromechanical System Pressure Sensor

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We present a differential wireless passive sensor based on read more a miniature antenna associated with a MEMS capacitive pressure sensor.In this configuration, a change in the external pressure results in a shift of the antenna resonance frequency and, thus, a variation in the antenna Radar Cross Section (RCS) detectable from a distance of a few meters.The MEMS and the antenna are modelled and simulated, and a co-design procedure is developed to optimize their performance.

The diegojavierfares.com MEMS are fabricated on a 200-mm technological platform and characterized.A specific setup was conceived to characterize the antenna sensor as a function of pressure in an anechoic chamber.